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发明名称
PROCESSING CHAMBER FOR MAKING SEMICONDUCTOR
摘要
申请公布号
KR20060040177(A)
申请公布日期
2006.05.10
申请号
KR20040089411
申请日期
2004.11.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, JONG ROK;CHOI, JIN HYUK;CHO, HYUNG CHUL;LEE, GUEN SUK
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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