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发明名称
Method Of Patterning Interlayer Dielectric And Semiconductor Device Fabricated By Using The Method
摘要
申请公布号
KR100578125(B1)
申请公布日期
2006.05.10
申请号
KR20030020174
申请日期
2003.03.31
申请人
发明人
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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