Mass flow controller with embedded web server

摘要

A mass flow controller 604 comprises a mass flow sensor (202) configured to produce a mass flow signal representative of a gas flow through the mass flow controller 604, an electronic controller (210) and an outlet valve (220). Based on the signal from the mass flow sensor (202), the electronic controller (210) produces a control signal for the outlet valve (220). The electronic controller (210) is also configured to operate as a web server 602 and provides access to the World Wide Web to allow the display of pages related to the operation and configuration of the mass flow controller.