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发明名称
APPARATUS AND METHOD FOR THERMAL PROCESSING OF SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
EP1135659(B1)
申请公布日期
2006.05.10
申请号
EP19990956983
申请日期
1999.11.12
申请人
MATTSON TECHNOLOGY INC.
发明人
JOHNSGARD, KRISTIAN E.;DAVIET, JEAN-FRANCOIS;GIVENS, JAMES A.;SAVAS, STEPHEN E.;MATTSON, BRAD, S.;ATANOS, ASHUR, J.
分类号
F27B5/14;H05B3/00;C30B31/12;F27D7/02;F27D11/02;F27D19/00;F27D21/00;H01L21/00;H01L21/324;H05B3/10;H05B3/14;H05B3/68
主分类号
F27B5/14
代理机构
代理人
主权项
地址
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