Process data management system for semiconductor processing equipment,申请号KR19990060245-传众专利搜索

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发明名称	Process data management system for semiconductor processing equipment
摘要
申请公布号	KR100576819(B1)	申请公布日期	2006.05.10
申请号	KR19990060245	申请日期	1999.12.22
申请人		发明人
分类号	H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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