ЛАЗЕРНАЯ МИКРООБРАБОТКА И СПОСОБЫ ЕЕ ОСУЩЕСТВЛЕНИЯ

摘要

The described embodiments relate to laser micromachining a substrate. One exemplary method includes forming a feature (404) into a substrate (300), at least in part, by directing a laser beam (410) at the substrate (300). During at least a portion of said forming, the method includes supplying liquid (422) to at least a first region (508a) of the feature along a first liquid supply path (b1) and supplying liquid (422) to at least a second different region (508b) of the feature (404) along at least a second liquid supply path (b2).