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经营范围
发明名称
WAFER TRANSFER ARM FOR WAFER LAVELING EQUIPMENT
摘要
申请公布号
KR20060040125(A)
申请公布日期
2006.05.10
申请号
KR20040089348
申请日期
2004.11.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JEANG, SIL GUN
分类号
H01L23/544;H01L21/68
主分类号
H01L23/544
代理机构
代理人
主权项
地址
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