BAKE APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE,申请号KR20040089153-传众专利搜索

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发明名称	BAKE APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20060039990(A)	申请公布日期	2006.05.10
申请号	KR20040089153	申请日期	2004.11.04
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, KYU JOONG
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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