| 摘要 |
FIELD: measuring engineering. ^ SUBSTANCE: transducer comprises recording electrode and exciting electrode that define capacitors with vibrating plate. The vibrating plate is made of monocrystalline silicon in block with four additional plates which provide required amplitude for recording vibration and are connected with the termination via flexible link. The vibrating plate, additional plate, and flexible links are used for bending vibration in the direction perpendicular to the plane of the vibrating plate. The longitudinal axis of the flexible links is in coincidence with the longitudinal axis of the vibrating plate. ^ EFFECT: enhanced precision and stability. ^ 4 dwg, 1 tbl |
