| 摘要 |
An angular velocity sensor is provided with an oscillator including a pair of drive arms, a base portion coupled to one end of each drive arm, and a flexible arm extending from the base portion in a direction opposite from the drive arms. This angular velocity sensor is also provided with driving member which oscillates the pair of drive arms in approaching or separating direction, and distortion detecting member which detects a distortion of the flexible arm in the oscillating direction of the drive arms.
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