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发明名称
APPARATUS FOR MANUFACTURING A SEMI-CONDUCTOR SUBSTRATE
摘要
申请公布号
KR20060040273(A)
申请公布日期
2006.05.10
申请号
KR20040089557
申请日期
2004.11.05
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
OK, JIN GU
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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