APPARATUS FOR DEPOSITION OF THIN-FILM, SOLID STATE BATTERIES

摘要

A multi-chambered deposition apparatus for depositing solid-state, thin-film battery materials onto substrate material. The apparatu s minimally includes at least three distinct evacuable deposition chambers (8, 9,10), which are physically interconnected in series. T he first deposition chamber (8) is adapted to deposit a layer of battery electrode ma terial having a first polarity onto the substrate. The s econd deposition chamber (9) is adapted to deposit a layer of solid-state electrol yte material onto the layer of battery electrode materia l deposited in the first chamber (8). The third deposition chamber (10) is adapted to de posit a layer of battery electrode material having an op posite polarity from that deposited in the first chamber (8) onto the solid-state e lectrolyte. The deposition chambers (8, 9, 10) are inter connected by gas gates (12) such that the substrate material is allowed to proceed fro m one deposition chamber to the next, while maintaining gaseous segragation between the chambers.