发明名称 Method for fabricating semiconductor package substrate with plated metal layer over conductive pad
摘要 A method for fabricating a semiconductor package substrate having a plated metal layer on a conductive pad is proposed. First of all, a first resist layer is formed on a semiconductor package substrate having a plurality of traces and conductive pads on a surface thereof. The first resist layer is provided with at least an opening, such that the opening is able to contact the adjacent trace. Subsequently, a conductive film is formed in the opening, such that the conductive film can electrically connect the adjacent trace and conductive pad. After removing the first resist layer, a second resist layer having a plurality of openings is formed on the surface of the substrate to expose the conductive pad. Afterwards, an electroplating process is performed on the substrate, so that a metal layer is formed on an exposed surface of the conductive pad. The second resist layer and the conductive film are then removed from the substrate. A solder mask layer having a plurality of openings is also formed on the surface of the substrate to expose the conductive pad which has been covered by the metal layer using the electroplating process.
申请公布号 US7041591(B1) 申请公布日期 2006.05.09
申请号 US20040025034 申请日期 2004.12.30
申请人 PHOENIX PRECISION TECHNOLOGY CORPORATION 发明人 LEE PEI-CHING;WANG XIAN-ZHANG;CHU E-TUNG
分类号 H01L21/44;C25D5/02;H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/44
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