| 发明名称 |
Method for the manufacture of micro structures |
| 摘要 |
Method for the Manufacture of Micro Structures A method for the manufacture of micro structures in substrates is provided. The method uses a combination of photolithographic mask technology and micro contact printing.
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| 申请公布号 |
US7041436(B2) |
申请公布日期 |
2006.05.09 |
| 申请号 |
US20030707426 |
申请日期 |
2003.12.12 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KRAUSE RAINER KLAUS;SCHMIDT MARKUS |
| 分类号 |
G03F7/00;G03F7/20;B81C1/00;C23C30/00;G03F1/08;G11B5/31;H01L21/027 |
主分类号 |
G03F7/00 |
| 代理机构 |
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