发明名称 Optical ready wafers
摘要 An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.
申请公布号 US7043106(B2) 申请公布日期 2006.05.09
申请号 US20020280492 申请日期 2002.10.25
申请人 APPLIED MATERIALS, INC. 发明人 WEST LAWRENCE C.;BJOERKMAN CLAES;MAYDAN DAN;BROYDO SAMUEL
分类号 G02B6/12;G02B6/30;G02B6/42;G02B6/43 主分类号 G02B6/12
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