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发明名称
ORIENTED PZT THIN FILM AND ITS COATING PROCESS USING LANTHANUM NITRATE BUFFER LAYER
摘要
申请公布号
KR20060039053(A)
申请公布日期
2006.05.08
申请号
KR20040088086
申请日期
2004.11.02
申请人
SEOUL NATIONAL UNIVERSITY INDUSTRY FOUNDATION
发明人
KIM, HYOUN EE;CHOI, JONG JIN
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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