SMALL-TYPE LIGHT SCAN DEVICE

摘要

There is provided a light scan device including: scan means for scanning irradiation light applied to an observation object; an objective lens system for collecting the irradiation light so that a focal point is obtained on the observation object; and a photo-detector element arranged at the emission side of the objective lens system and on the optical axis of the objective lens system for transmitting the irradiation light and detecting the transmitting position. According to this light scan device, by arranging the photo-detector element on the optical axis of the objective lens system, it is possible to provide a light scan device having a smaller size as compared to the conventional device and having a light position detector capable of highly accurate spot position detection by directly detecting the irradiation light.