Device and method for determining an edge coverage during coating processes

摘要

In a method for determining an edge coverage during coating processes a substrate is provided, a mask layer is deposited on the substrate, at least one through hole is formed in the mask layer and at least one first trench-type depression is formed in the substrate by patterning the substrate and the mask layer. An expanded second trench-type depression which extends in a direction parallel to the surface of the substrate is obtained by expanding isotropically the first trench-type depression. The second trench-type depression comprises a lateral trench opening at at least one lateral end region so that a coating material can penetrate laterally into the second trench-type depression through the trench opening.