Interferometric simultaneous measurement of the topography and refractive index of the surface of an object by measuring the spatial phase distributions from both transmission and reflection interferograms

摘要

Interferometry method for determining the topography and refractive index distribution of the surface of an object (3) has the following steps: simultaneous measurement of a transmission interferogram and reflection interferogram, reconstruction of spatial phase distributions from both the transmission and reflection interferograms and determination of the topography and refractive index distribution for the object from the two phase distributions. An independent claim is made for an interferometer for determining the topography and refractive index distribution of the surface of an object.