SUBSTRATE FOR THIN FILM PHOTOELECTRIC CONVERTER AND INTEGRATED THIN FILM PHOTOELECTRIC CONVERTER EMPLOYING IT

摘要

To improve light beam transmittance of a substrate for a thin film photoelectric converter in which zinc oxide is formed on a translucent insulating substrate such as a glass substrate as a transparent electrode layer, and to enhance photoelectric conversion efficiency of a thin film photoelectric converter employing that substrate. The substrate for a thin film photoelectric converter has a translucent insulating substrate, an intermediate layer deposited thereon and a transparent electrode layer containing at least zinc oxide, characterized in that refractive index in the intermediate layer changes smoothly from the translucent insulating substrate side toward the transparent electrode layer side, and the intermediate layer has such surface protrusions and recesses on the transparent electrode layer-side interface that the protrusion is formed of curved surface. Light beam transmittance of the substrate for thin film photoelectric converter is improved and photoelectric conversion efficiency of a thin film photoelectric converter employing that substrate is enhanced.