发明名称 |
Process for manufacturing optical and semiconductor elements |
摘要 |
A method for fabricating an array of precisely shaped and located shaped elements utilizes a precisely shaped patterned abrasive to form channels in a workpiece. One or more patterned abrasives contact and abrade along one or more intersecting axes to define the shaped elements. The shaped elements may include optical elements, semiconductor elements, or both.
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申请公布号 |
US2006094340(A1) |
申请公布日期 |
2006.05.04 |
申请号 |
US20040977239 |
申请日期 |
2004.10.29 |
申请人 |
OUDERKIRK ANDREW J;LUGG PAUL S;BENSON OLESTER JR;LEATHERDALE CATHERINE A;JOSEPH WILLIAM D |
发明人 |
OUDERKIRK ANDREW J.;LUGG PAUL S.;BENSON OLESTER JR.;LEATHERDALE CATHERINE A.;JOSEPH WILLIAM D. |
分类号 |
B24B7/30;B24B1/00;H01L33/20;H01L33/58 |
主分类号 |
B24B7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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