发明名称 Kristallspaltvorrichtung
摘要 Apparatus (10) for cleaving a crystalline segment (12), including a pair of aligning pins (24) facing a first cleave plane (16) formed on a first side of a crystalline segment (12), an impact pin (22) facing a second cleave plane (17) formed on a second side of the crystalline segment (12) opposite to the first side, the crystalline segment (12) having a cleave line (14) extending between and generally perpendicular to the opposing cleave planes (16, 17), and an actuator (26) connected to at least one of the aligning pins (24) and the impact pin (22), for causing relative movement of the aligning pins (24) and the impact pin (22) towards each other, such that the aligning pins (24) abut against the first cleave plane (16) and the impact pin (22) abuts against the second cleave plane (17). <IMAGE>
申请公布号 DE69930205(D1) 申请公布日期 2006.05.04
申请号 DE1999630205 申请日期 1999.04.22
申请人 SELA SEMICONDUCTOR ENGINEERING LABORATORIES LTD.,YOKNEAM 发明人 BOGUSLAVSKY, DMITRI;SMITH, COLIN;BEN-NATHAN, ARNON
分类号 B28D5/00;G01N1/28;H01L21/66 主分类号 B28D5/00
代理机构 代理人
主权项
地址