| 发明名称 |
SYSTEM FOR FABRICATING ELECTRICAL CIRCUITS EMPLOYING A FLUID FLOW SUPPORTER |
| 摘要 |
A method for supporting a flat substrate (122) during fabrication, employing a fluid flow supporter (125,127) operating at a first fluid pressure and a first flow volume. A high pressure, low volume, fluid input is converted to reduce the pressure and increase the volume for levitating in fabrication electrical circuits. |
| 申请公布号 |
WO2004079496(A3) |
申请公布日期 |
2006.05.04 |
| 申请号 |
WO2004IL00201 |
申请日期 |
2004.03.02 |
| 申请人 |
ORBOTECH LTD.;SHIGERU, YAMAMOTO;ADIN, RAANAN |
发明人 |
SHIGERU, YAMAMOTO;ADIN, RAANAN |
| 分类号 |
B65G51/03;B65G49/06;G06F;H01L21/677;H01L21/68;H05K13/00 |
主分类号 |
B65G51/03 |
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