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发明名称
Verfahren zur Herstellung von Transistoren in integrierten Halbleiterschaltungen
摘要
申请公布号
DE10140047(B4)
申请公布日期
2006.05.04
申请号
DE20011040047
申请日期
2001.08.16
申请人
INFINEON TECHNOLOGIES AG
发明人
GRAF, WERNER
分类号
H01L21/8234;H01L21/60;H01L21/8238;H01L21/8242
主分类号
H01L21/8234
代理机构
代理人
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