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发明名称
METHOD FOR FABRICATION OF DEEP CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060038585(A)
申请公布日期
2006.05.04
申请号
KR20040087676
申请日期
2004.10.30
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE, DONG DUK
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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