| 摘要 |
A drive piston (11) is vertically movably inserted in a housing (8). A pull rod (18) is projected above a supporting surface (S) of the housing (8) and radially movably connected to the piston (11). An inner engagement member (38) is vertically movably supported at the outer periphery of the pull rod (18). The inner engagement member (38) is made movable in the radial direction relative to the housing (8) and advanced upward by a disc spring (41). Outer engagement members (39) inserted in an engagement hole (3) of a work pallet (2) are arranged on the outer periphery of the inner engagement member (38). The outer engagement members (39) are wedged from the above onto the inner engagement member (38). The upper part of the pull rod (18) is connected to the outer engagement members (39). The outer engagement members (39) are urged radially inward by a ring-like plate spring (44).
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