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发明名称
Method for making interconnect structures
摘要
申请公布号
EP1320128(B1)
申请公布日期
2006.05.03
申请号
EP20010403275
申请日期
2001.12.17
申请人
AMI SEMICONDUCTOR BELGIUM BVBA
发明人
BRUNEEL, PIERRE, STEFAAN;DE BACKER, EDDY;FATKHOUTDINOV, MALIK MASGUTOVICH
分类号
H01L21/3213;H01L21/02;H01L21/311
主分类号
H01L21/3213
代理机构
代理人
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