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发明名称
IMPEDANCE-TO-VOLTAGE CONVERTER
摘要
申请公布号
EP0970386(B1)
申请公布日期
2006.05.03
申请号
EP19990900308
申请日期
1999.01.14
申请人
TOKYO ELECTRON LIMITED;HOKUTO ELECTRONICS, INC.
发明人
HIROSHIMA, TATSUO;NAKANO, KOICHI;HARADA, MUNEO;MATSUMOTO, TOSHIYUKI;HIROTA, YOSHIHIRO
分类号
G01D5/24;G01N27/22;G01R27/26
主分类号
G01D5/24
代理机构
代理人
主权项
地址
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