| 摘要 |
<p>The pump has a motor (7) that is inserted inside a cavity (5c) of a molecular rotor (5a) of a molecular pumping stage (5). The motor permits a rotation speed higher than 20000 revolutions per minute, such that electrical power density is high. An upstream end (8b) of a crank shaft (8) is coupled to the rotor and a downstream zone (8b) of the shaft is connected to the primary rotor (9a).</p> |
