发明名称 CONTACT PROBE, METHOD OF MANUFACTURING THE CONTACT PROBE, AND DEVICE AND METHOD FOR INSPECTION
摘要 A method of manufacturing a contact probe includes an electroforming step of, using a resist film (522) arranged on a substrate (521) as a pattern frame having a shape corresponding to a contact probe, performing electroforming to fill a gap in the resist film (522) to form a metal layer (526), a tip end shaping step of obliquely removing and sharpening that part of the metal layer (526) which serves as a tip end portion of the contact probe, and a take-out step of taking out only the metal layer (526) from the pattern frame. <IMAGE>
申请公布号 KR100576899(B1) 申请公布日期 2006.05.03
申请号 KR20067002895 申请日期 2006.02.10
申请人 发明人
分类号 G01R1/067;G01R3/00;G01R15/24 主分类号 G01R1/067
代理机构 代理人
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