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发明名称
SURFACE PREPARATION PRIOR TO DEPOSITION ON GERMANIUM
摘要
申请公布号
EP1652226(A2)
申请公布日期
2006.05.03
申请号
EP20040780037
申请日期
2004.08.03
申请人
ASM AMERICA, INC.
发明人
WILK, GLEN
分类号
H01L;H01L21/28;H01L21/31;H01L21/314;H01L21/316;H01L21/44;H01L21/469;H01L29/51;H01L31/117;(IPC1-7):H01L21/44
主分类号
H01L
代理机构
代理人
主权项
地址
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