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发明名称
Method for forming capacitor of semiconductor device
摘要
申请公布号
KR100575883(B1)
申请公布日期
2006.05.03
申请号
KR20040017647
申请日期
2004.03.16
申请人
发明人
分类号
H01L21/8242
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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