Polymer, Resist Composition and Patterning Process,申请号KR20010011128-传众专利搜索

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发明名称	Polymer, Resist Composition and Patterning Process
摘要
申请公布号	KR100576200(B1)	申请公布日期	2006.05.03
申请号	KR20010011128	申请日期	2001.03.05
申请人		发明人
分类号	G03F7/004;C08F232/08;G03F7/039	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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