发明名称 |
Very high sensitivity magnetic sensor |
摘要 |
A magnetic sensor includes a thin deformable membrane made of a conductive material forming a first plate of a capacitor which conducts an electric current therethrough. A second capacitor plate of the capacitor includes a doped region of a semiconductor substrate. A layer of a gaseous dielectric separates the two plates. The membrane deforms due to the effect of the Lorentz force generated by a magnetic field lying in the plane of the membrane and perpendicular to the lines of current being conducted therethrough. In addition, a process for fabricating this magnetic sensor is also provided as well as a device for measuring a magnetic field using the magnetic sensor.
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申请公布号 |
US7038285(B2) |
申请公布日期 |
2006.05.02 |
申请号 |
US20020149093 |
申请日期 |
2002.09.05 |
申请人 |
STMICROELECTRONICS SA |
发明人 |
JAOUEN HERVE;SKOTNICKI THOMAS;JURCZAK MALGORZATA |
分类号 |
H01L29/82;G01D5/242;G01L9/00;G10K9/13 |
主分类号 |
H01L29/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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