发明名称 |
Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients |
摘要 |
A device comprising a resonator formed of a piezoelectric layer sandwiched between two metal electrodes, the resonator being laid on a suspended beam, the device comprising means for deforming said beam by the difference in thermal expansion coefficients.
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申请公布号 |
US7038355(B2) |
申请公布日期 |
2006.05.02 |
申请号 |
US20040814619 |
申请日期 |
2004.03.31 |
申请人 |
STMICROELECTRONICS SA |
发明人 |
BOUCHE GUILLAUME;ANCEY PASCAL;CARUYER GREGORY |
分类号 |
H02N2/00;B81B3/00;H01L41/00;H03H9/17 |
主分类号 |
H02N2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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