发明名称 Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
摘要 A multiple-bit cell transistor includes a P type silicon substrate, a gate insulation layer, a pair of N type source/drain regions, a pair of tunnel insulation layers, and a pair of floating gates. The silicon substrate is formed with a projection while the floating gates each are positioned on one of opposite side walls of the projection. Inter-polycrystalline insulation layers each are formed on one of the floating gates. A control gate faces the top of the projection via the gate insulation layer. An N type region is formed on each side of the projection and contacts the source/drain region adjoining it. The cell transistor lowers a required write voltage, broadens a current window, and enhances resistance to inter-band tunneling.
申请公布号 US7037782(B2) 申请公布日期 2006.05.02
申请号 US20040893500 申请日期 2004.07.19
申请人 INNOTECH CORPORATION 发明人 MIIDA TAKASHI
分类号 H01L21/336;H01L27/10;H01L21/28;H01L21/8247;H01L27/105;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
代理机构 代理人
主权项
地址