发明名称 |
CD metrology analysis using green's function |
摘要 |
A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.
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申请公布号 |
US7038850(B2) |
申请公布日期 |
2006.05.02 |
申请号 |
US20050030735 |
申请日期 |
2005.01.06 |
申请人 |
THERM-WAVE, INC. |
发明人 |
CHANG YIA CHUNG;CHU HANYOU;OPSAL JON |
分类号 |
G01B11/00;G01N21/47;G01N31/00 |
主分类号 |
G01B11/00 |
代理机构 |
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