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发明名称
FINE PATTERNING METHOD OF METAL LAYER
摘要
申请公布号
KR100577691(B1)
申请公布日期
2006.05.01
申请号
KR20050008544
申请日期
2005.01.31
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HA, BYEOUNG JU;KIM, KYU SIK;HONG, SEOG WOO
分类号
H01L21/306;B81B7/02;H01L21/28
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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