| 摘要 |
PROBLEM TO BE SOLVED: To provide a lamination apparatus of disk substrates and a lamination method by which width of an adhesive layer can be formed surely, uniformly, and stably with a comparatively simple mechanism, width of an outer peripheral part can be adjusted surely and simply. SOLUTION: When a disk substrate 20 and a disk substrate 21 to which an adhesive 35 and an adhesive 38 are coated respectively to lamination planes by spin coat are laminated together, the outer peripheral part of the disk substrate 20 is pressed stepwise to the radial direction from the outer peripheral side so that an inner peripheral ring 52 presses after an outer peripheral ring 51. The disk substrate 20 is bent by pressure of the outer peripheral ring, bubbles mixed in the adhesive layer are pressed out toward the inner peripheral side. Also, width of the adhesive extended thickly toward the outer peripheral part from the inner peripheral part by spin coat is uniformalized by pressing the inner side of the outer peripheral part. COPYRIGHT: (C)2006,JPO&NCIPI
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