发明名称 |
Method and system for focused ion beam directed self-assembly of metal oxide island structures |
摘要 |
A process for guiding the growth of metal oxide islands of material which involves: presenting a metal oxide surface to a charged particle beam; impinging the metal oxide surface with ions from the charged particle beam; presenting said metal oxide surface to a deposition chamber; coating said surface with vapor to generate metal oxide islands.
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申请公布号 |
US2006088952(A1) |
申请公布日期 |
2006.04.27 |
申请号 |
US20050039305 |
申请日期 |
2005.01.21 |
申请人 |
GROVES JAMES F;DU YINGGE;WORTMAN ROBERT |
发明人 |
GROVES JAMES F.;DU YINGGE;WORTMAN ROBERT |
分类号 |
H01L21/16;H01L21/36 |
主分类号 |
H01L21/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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