MICROELECTROMECHANICAL DEVICE HAVING PIEZOELECTRIC BLOCKS AND METHOD OF FABRICATION SAME

摘要

Microelectromechanical systems with structures having piezoelectric actuators (104) are described. Each actuator comprises a piezoelectric island supported by a body (200). The piezoelectric islands can be formed, in part, by forming cuts (145) into a thick layer of piezoelectric material, attaching the cut piezoelectric layer (107) to said body (200) having etched features and grinding the piezoelectric layer to a thickness that is less than the depths of the cuts (140). Conductive material (158, 210) can be formed on the piezoelectric layer to form electrodes (106, 112).