| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical image measuring instrument capable of forming a three-dimensional image or the like, which is based of a tomographic image at every depth of matter to be measured, with high precision even if the matter to be measured is moved during measurement. <P>SOLUTION: The optical image measuring instrument is equipped with a half mirror 6 for dividing the leaser beam from a low coherent light source into a signal beam S and a reference beam R; a frequency shifter 8 for shifting the frequency of the reference beam R; a reference mirror 9 and a piezoelectric elements 9A both of which alter the light path length of the reference beam R; CCDs 21 and 22 for detecting the interference beam L, which is formed by superposing the signal beam S and the reference beam R on upon another by the half mirror 6 to output a detection signal; an image forming part 51 for forming a tomographic images based on the detection signal; a measuring depth calculation means 53 for calculating the measuring depth of the tomographic images; and an image processing part 57 for arranging a plurality of the formed tomographic images in a measuring depth direction based on the measuring depth. In the image processing part 57, the three-dimensional image is formed on the basis of the arranged tomographic images. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
