| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a purifying method, by which the apparatus constitution can be made simple, and the equipment cost and the operation cost can be reduced when argon gas containing impurities is purified; and to obtain a purifying apparatus. <P>SOLUTION: The argon gas containing carbon monoxide, hydrogen, oxygen and nitrogen as the impurities is purified by using a catalyst tube 7, wherein carbon monoxide and hydrogen contained in the argon gas are allowed to react with oxygen and converted into carbon dioxide and water, and adsorption tubes 9a, 9b in each of which a first adsorption layer for removing water contained in the gas formed in the catalyst tube 7, a second adsorption layer for removing carbon dioxide contained in the gas from the first adsorption layer, and a third adsorption layer for removing carbon monoxide and nitrogen contained in the gas from the second adsorption layer are provided, and setting the adsorption temperature and the regeneration temperature in the first to third adsorption layers to a same temperature. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
