发明名称 METHOD FOR CREATING CONDUCTIVE PATH AND METHOD FOR MANUFACTURING RANDOM NUMBER GENERATION ELEMENT USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a method for stably creating a random conductive path and a method for manufacturing a random number generation element using the same. SOLUTION: A solution containing protein having a core, for instance, ferritin involving iron as the core is dropped on the random number generation element 20, to adsorb protein, remove protein and leave a core 31 behind. With using the core 31 as a mask, the semiconductor of an opening 25 is etched, thereby forming an undulation of the semiconductor 3. Thus, since the generation mechanism of the undulation of the semiconductor 3 is clear and a control or observation can be made, a stable production is possible. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006114721(A) 申请公布日期 2006.04.27
申请号 JP20040301145 申请日期 2004.10.15
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 UEDA MICHIHITO;YOSHII SHIGEO;MORITA KIYOYUKI;YAMASHITA ICHIRO
分类号 H01L29/786;G09C1/00;H01L21/3065 主分类号 H01L29/786
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