| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure-sensitive adhesive sheet for laser processing processable at a high speed with high accuracy and effectively suppressing staining of the surface of a material to be processed with degraded materials when the material to be processed is processed by ultraviolet absorbing ablation of laser beams and readily recovering the material to be processed after processing and to provide a method for readily producing the laser processed product with good production efficiency using the pressure-sensitive adhesive sheet for the laser processing. SOLUTION: The pressure-sensitive adhesive sheet for the laser processing is used when the material to be processed is processed by the ultraviolet absorbing ablation of the laser beams. The pressure-sensitive adhesive sheet is provided with at least a pressure-sensitive adhesive layer on a substrate. The pressure-sensitive adhesive sheet for the laser processing has 0.1-1 N/25 mm tape width pressure-sensitive adhesive strength when the pressure-sensitive adhesive sheet is applied to a silicon mirror wafer and then peeled under conditions of 23±3°C measuring temperature, 180°peel angle and 2.5 mm/s peel rate. COPYRIGHT: (C)2006,JPO&NCIPI
|
