| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a diamond component with good reproducibilty and productivity which can be applied to a fine optical component or the like. SOLUTION: The method for manufacturing the diamond component includes a first layer forming step for forming a first layer 2 on the surface of a base body 1 made of diamond, a second layer forming step for forming a second layer 5 having a dome-like surface 5a on the surface of the first layer 2, a first dry etching step for dry etching the second layer 5 and the first layer 2 until the first layer 2 has a dome-like surface, a second dry etching step for dry etching the first layer 2 and the base body 1 until the surface of the base body 1 has a dome-like surface 8a, and a focusing ion beam irradiation step for irradiating the formed dome-like surface 8a of the base body 1 with a focusing ion beam. COPYRIGHT: (C)2006,JPO&NCIPI
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