| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing apparatus which has high positioning accuracy by using an inexpensive device and processing in shape with high use efficiency of light by preventing degradation in positional control due to vibration in a mechanically movable component without using an expensive positioning device. <P>SOLUTION: The laser processing apparatus is equipped with: a laser light source 11; a spatial phase modulating means 13 to modulate phases of the laser light 12 emitting from the laser light source 11; data input means 16, 17 which generate synthesized data by adding position moving hologram data for reproducing an image of a predetermined processed shape in a predetermined processing position on the surface to be processed, to process hologram data corresponding to the predetermined processed shape, and then which input the synthesized data in the spatial phase modulating means 13; and an imaging means 14 which reproduces a hologram image by the laser light 12 subjected to phase modulation by the spatial phase modulating means 13 onto the surface to be processed. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
