| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the generations of liquid leakages and particles in a liquid feeder. <P>SOLUTION: The liquid feeder has a pump 61 for resists which feeds a resist liquid, a housing 610, a first piston 611, a first driving mechanism 612, a second piston 613, and a second driving mechanism 614. The housing 610 and the second piston 613 are contacted slipperily with each other, and the first and second pistons 611, 613 are contacted slipperily with each other. When coating a substrate with the resist liquid, only the first piston 611 is so proceeded in a (+Z) direction by the first driving mechanism 612 as not to slide the first piston on the housing 610. When substituting the resist liquid for others, not only the first piston 611 but also the second piston 613 are so moved in the (+Z) direction by the second driving mechanism 614 as to exhaust the resist liquid completely. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
