发明名称 BOARD PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a board processor which enables efficient work of placing a support, which suppresses the formation of slips or flaws on a board on a supporting implement, and which raises less concern of polluting the interior of a furnace. SOLUTION: The supporting implement 30 is rotated to turn its board insertion inlet 46 to the back of the board processor, and a back door 36 is opened. Then the support 50 is inserted into the processor from its back to be set on the supporting implement 30. The back door 36 is then closed, and the supporting implement 30 setting the support 50 thereon is rotated by a rotating shaft to turn the board insertion inlet 46 of the supporting implement 30 in the direction of advance/retreat of a board transfer machine (the front of the processor). COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006114870(A) 申请公布日期 2006.04.27
申请号 JP20050149308 申请日期 2005.05.23
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 ISHIGURO KENICHI;SHIMADA TOMOHARU;MOROHASHI AKIRA;NAKAJIMA SADAO
分类号 H01L21/683;H01L21/22;H01L21/31;H01L21/324 主分类号 H01L21/683
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