| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique where, at the time when a metal mask 1 at which a plurality of mask parts 2 having many fine opening parts are arranged is fixed to a frame, the position of each mask part is correctly aligned. SOLUTION: Each side of a metal mask 1 is grasped by a plurality of tension units 13 and is pulled to apply tension to the metal mask 1, further, a glass scale 25 is superimposed on the metal mask 1, and the tension applied by each tension unit 13 is controlled in such a manner that cross marks 6 formed at the metal mask 1 are made coincident with crossings corresponding to the standard lines 27 of the glass scale 25, thus the position of each mask part 2 is correctly aligned. COPYRIGHT: (C)2006,JPO&NCIPI
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